产品型号：
Ailesic-1500
产品介绍（Ailesic-1500）：
1. Adapt to 1500℃Extra High Temp Processes
-Rapid Heating: ～20℃/min (10℃/minover 1350℃)
-Mass production Capability: ～50 wafers/batch
2. Attain and Maintain Extra Low Metal Cont.
-Extra High Purity All-CVD SiC Wares
-Effective In-situ Cleaning System
3. Extra Low Running Cost
-Long life SiC wares
-Long life Heater
