粉体行业在线展览
8/12寸石英管(硅片加热)清洗机
面议
江苏声达
8/12寸石英管(硅片加热)清洗机
256
适用工件: (Applicable parts) | 1-1.7米,8寸,12寸石英管(用于硅片加热)兼容和石英部件 1-1.7 m length,8”,12”Quartz tube(use for Slicon wafer heating)&Quartz parts |
批量产能: (Capacity) | 根据客户需求/Customerized |
工艺流程: (Procedure flow) | 人工上料→炉管旋转,药液循环清洗→药液排放至储酸槽→纯水清洗→氮气吹干→人工下料 Manual Load→Quartz tube rotation,chemicals recycling clean→Chemicals Drain to tank of acid storage→DIW clean→N2 Dry→Manual Unload |
主要材料: (Major material) | 金属骨架SUS304,槽体采用PPN或PVDF (Metal frame SUS 304,the tank uses PPN or PVDF) |
运送方式: (Transportation) | 手动传送 (Manual) |
节拍时间: (Step time) | 依工艺可调 (Based on process,Adjustable) |
工艺效果: (Process effect) | 清除石英管件上的污染物/Remove contaminant on the surface of Quartz parts or Tube) |
其他说明: | 设备可以根据客户要求定制手动/半自动 (Customized:Semiautomatic or manual) |
适用工件: (Applicable parts) | 1-1.7米,8寸,12寸石英管(用于硅片加热)兼容和石英部件 1-1.7 m length,8”,12”Quartz tube(use for Slicon wafer heating)&Quartz parts |
批量产能: (Capacity) | 根据客户需求/Customerized |
工艺流程: (Procedure flow) | 人工上料→炉管旋转,药液循环清洗→药液排放至储酸槽→纯水清洗→氮气吹干→人工下料 Manual Load→Quartz tube rotation,chemicals recycling clean→Chemicals Drain to tank of acid storage→DIW clean→N2 Dry→Manual Unload |
主要材料: (Major material) | 金属骨架SUS304,槽体采用PPN或PVDF (Metal frame SUS 304,the tank uses PPN or PVDF) |
运送方式: (Transportation) | 手动传送 (Manual) |
节拍时间: (Step time) | 依工艺可调 (Based on process,Adjustable) |
工艺效果: (Process effect) | 清除石英管件上的污染物/Remove contaminant on the surface of Quartz parts or Tube) |
其他说明: | 设备可以根据客户要求定制手动/半自动 (Customized:Semiautomatic or manual) |
适用工件: (Applicable parts) | 1-1.7米,8寸,12寸石英管(用于硅片加热)兼容和石英部件 1-1.7 m length,8”,12”Quartz tube(use for Slicon wafer heating)&Quartz parts |
批量产能: (Capacity) | 根据客户需求/Customerized |
工艺流程: (Procedure flow) | 人工上料→炉管旋转,药液循环清洗→药液排放至储酸槽→纯水清洗→氮气吹干→人工下料 Manual Load→Quartz tube rotation,chemicals recycling clean→Chemicals Drain to tank of acid storage→DIW clean→N2 Dry→Manual Unload |
主要材料: (Major material) | 金属骨架SUS304,槽体采用PPN或PVDF (Metal frame SUS 304,the tank uses PPN or PVDF) |
运送方式: (Transportation) | 手动传送 (Manual) |
节拍时间: (Step time) | 依工艺可调 (Based on process,Adjustable) |
工艺效果: (Process effect) | 清除石英管件上的污染物/Remove contaminant on the surface of Quartz parts or Tube) |
其他说明: | 设备可以根据客户要求定制手动/半自动 (Customized:Semiautomatic or manual) |