粉体行业在线展览
石墨烯卷对卷设备
面议
山东力冠
石墨烯卷对卷设备
277
产品特点/Product Characteristics:
♦ 石墨烯薄膜产业化设备
Graphene film industrialization equipment
♦ 宽幅卷对卷连续生长
Wide roll-to-roll continuous growth
♦ APC系统:真空蝶阀自动控制
APC System: Automatic Control of Vacuum Butterfly Valve
♦ 碳源等工艺气体MFC控制
MFC control of process gas such as carbon source
♦ 薄膜制备过程全自动控制
Automatic control of film preparation process
♦ 三腔室结构
Three-chamber structure
技术指标/Technical Indicators:
♦ 工作温度:800-1050°C
Operating temperature: 800-1050°c
♦ 工艺管材质:石英管
Material of process tube: quartz tube
♦ 铜箔宽度:500mm
lnner diameter of process pipe: medium 550mm
♦ 极限真空度:小于3Pa,可恒压控制
Limit vacuum degree: less than 3Pa, which can be controlled by constant pressure
♦ 恒温区:1000mm、五段控温
Constant temperature zone: 1000mm, five-stage temperature control
♦ 工艺管内径:550mm
lnner diameter of process pipe: medium 550mm
♦ 铜箔运行速度约:100-400mm/min,可调
The running speed of copper foil is about 100-400mm/min, which can be adjusted